1. Inqubo Yokusebenzisa I-Laser ye-SE
Inhloso:Inqubo yokukhipha i-laser ye-Selective Emitter (SE) ithuthukisa ungqimba lwe-emitter kuseli le-TOPCon lohlobo lwe-N ukuze kuncishiswe ukumelana kokuthintana futhi kuthuthukiswe ukusebenza kahle kokuguqulwa.
Indlela yokusebenza:Amandla e-laser ancibilikisa ubuso be-silicon, okwenza ama-athomu e-boron (B) engilazini ye-borosilicate asakazeke ngokushesha ku-silicon, okudala ungqimba olune-doped kakhulu. Ukufaka i-doped ephezulu ezindaweni zokuxhumana kunciphisa ukumelana nokuxhumana, kuyilapho ukufaka i-doped elula kwenye indawo kunciphisa ukulahlekelwa kokuhlanganiswa kabusha, ekugcineni kuthuthukise ukusebenza kahle ngo-0.2%-0.4%.
2. Ukwakheka Kwezingqimba Ze-Tunnel Oxide kanye Ne-Polycrystalline Silicon
Inhloso:Lezi zendlalelo ezingemuva kwe-silicon wafer zakha isakhiwo sokuxhumana esingenamsebenzi, esibalulekile ekunciphiseni ukuhlanganiswa kabusha nokuthuthukisa ukusebenza kahle.
Indlela:Indlela ye-Plasma Enhanced Chemical Vapor Deposition (PECVD) ekhethwa embonini ifaka ifilimu ye-silicon oxide engu-1-2nm kanye nesendlalelo se-silicon esingenasimo esingu-100-150nm esinomfanekiso, esicwebezelayo ngesikhathi sokufakwa kwe-annealing ukuze sakhe isendlalelo se-polycrystalline. I-PECVD inikeza isivinini esikhulu sokufakwa, ukungcola okuncishisiwe, kanye nezindleko eziphansi, okwenza kube ukukhetha okuphumelelayo kokukhiqizwa ngobuningi.
3. Isimbozo Esingabonisi Ukukhanya (i-ARC)
Inhloso:Isakhiwo se-dielectric esinezingqimba eziningi (i-SiOx/SiONx/SiNx) sinciphisa ukulahlekelwa ukukhanya futhi sithuthukisa ukumuncwa kokukhanya, sikhulisa i-photocurrent kanye nokusebenza kahle.
Izinzuzo Ezengeziwe:I-ARC ihlinzeka ngokukhululeka kobuso ngokunciphisa amazinga okuhlangana kabusha kobuso, yandisa isikhathi sokuphila kwamaseli, futhi ivikele izendlalelo ezibekwe ngaphambili (njenge-alumina ngaphambili) ekulimaleni nasekungcoleni.
4. Ukudubula Okubangelwa Yi-Laser (LIF)
Inhloso:I-LIF isetshenziswa ukuphrinta ngemuva kwesikrini ukuze kuthuthukiswe ukuxhumana phakathi kwe-metal paste ne-silicon. Le nqubo ithuthukisa ukuxhumana kwe-ohmic futhi inciphisa ukumelana kokuxhumana, ithuthukise ukuphuma kukagesi.
Umthelela:I-LIF iboniswe ukuthi ikhulisa ukusebenza kahle kokuguqulwa ngo-0.2% noma ngaphezulu, okwenza kube yinto ebalulekile ekukhiqizweni kwe-TOPCon.
Lezi zinyathelo zenqubo eziyinhloko ziqokomisa amasu okukhiqiza athuthukile kubuchwepheshe be-TOPCon, okuvumela ukusebenza kahle okuphezulu kanye nokuzinza okuthuthukisiwe ekusebenzeni kwamaseli elanga.
