1. Inkqubo yokuDopa iLaser ye-SE
Injongo:Inkqubo yokusetyenziswa kwe-laser ye-Selective Emitter (SE) iphucula umaleko we-emitter kwiseli ye-TOPCon yohlobo lwe-N ukunciphisa ukumelana noqhagamshelwano kunye nokuphucula ukusebenza kakuhle kokuguqulwa.
Indlela yokusebenza:Amandla e-laser anyibilikisa umphezulu we-silicon, nto leyo evumela ii-athomu ze-boron (B) kwiglasi ye-borosilicate ukuba zisasazeke ngokukhawuleza kwi-silicon, nto leyo eyenza umaleko oxutywe kakhulu. Ukuxuba kakhulu kwiindawo zokudibanisa kunciphisa ukumelana nokudibanisa, ngelixa ukusebenzisa i-doping elula kwenye indawo kunciphisa ukulahleka kokudibanisa, ekugqibeleni kuphucula ukusebenza kakuhle nge-0.2%-0.4%.
2. Ukwenziwa kweTunnel Oxide kunye nePolycrystalline Silicon Layers
Injongo:Ezi layer ezikwicala elingasemva le-silicon wafer zenza ulwakhiwo loqhagamshelwano olungenamsebenzi, olubalulekileyo ekunciphiseni ukudibana kwakhona kunye nokuphucula ukusebenza kakuhle.
Indlela:Indlela yePlasma Enhanced Chemical Vapor Deposition (PECVD) ekhethwayo kushishino ibeka ifilimu ye-silicon oxide eyi-1-2nm kunye nomaleko we-silicon ongenanto ongama-100-150nm, oqina ngexesha lokutsalwa ukuze wenze umaleko we-polycrystalline. I-PECVD inika isantya esiphezulu sokufakwa, ungcoliseko oluncitshisiweyo, kunye nexabiso eliphantsi, okwenza ukuba ibe lukhetho olusebenzayo kwimveliso enkulu.
3. Ukwaleka Okungabonisi Ukukhanya (i-ARC)
Injongo:Isakhiwo se-dielectric esineengqimba ezininzi (i-SiOx/SiONx/SiNx) sinciphisa ukulahleka kokukhanya kwaye siphucula ukufunxwa kokukhanya, siphucula i-photocurrent kunye nokusebenza kakuhle.
Ezinye iingenelo:I-ARC ibonelela ngokudlulisa umphezulu ngokunciphisa amazinga okuphinda kuhlanganiswe umphezulu, yandise ubomi beeseli, kwaye ikhusela iileya ezazibekwe ngaphambili (ezifana ne-alumina ngaphambili) ekonakaleni nasekungcoleni.
4. Ukudubula Okubangelwa Yilaser (LIF)
Injongo:I-LIF isetyenziselwa ukuprinta emva kwesikrini ukuze ilungelelanise unxibelelwano phakathi kwentsimbi kunye ne-silicon. Le nkqubo iphucula unxibelelwano lwe-ohmic kwaye inciphisa ukumelana nonxibelelwano, iphucula imveliso yombane.
Impembelelo:I-LIF ibonakalisiwe ukuba yonyusa ukusebenza kakuhle kokuguqula nge-0.2% nangaphezulu, nto leyo eyenza ukuba ibe lolona ncedo lubalulekileyo kwimveliso ye-TOPCon.
La manyathelo aphambili enkqubo agxininisa iindlela eziphambili zokuvelisa ubuchwepheshe be-TOPCon, ezivumela ukusebenza kakuhle kunye nokuzinza okuphuculweyo ekusebenzeni kweeseli zelanga.
